Deposition of Titanium Nitride by Vapor Phase Reaction
نویسندگان
چکیده
منابع مشابه
A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition
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ژورنال
عنوان ژورنال: NIPPON KAGAKU KAISHI
سال: 1974
ISSN: 2185-0925,0369-4577
DOI: 10.1246/nikkashi.1974.1043